Microwave analysis of PACVD diamond deposition reactor based on electromagnetic modelling

Published 2009 View Full Article

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Title
Microwave analysis of PACVD diamond deposition reactor based on electromagnetic modelling
Authors
Keywords
-
Journal
DIAMOND AND RELATED MATERIALS
Volume 19, Issue 5-6, Pages 397-403
Publisher
Elsevier BV
Online
2009-11-07
DOI
10.1016/j.diamond.2009.10.032

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