Control of abnormal grain inclusions in the nanocrystalline diamond film deposited by hot filament CVD

Title
Control of abnormal grain inclusions in the nanocrystalline diamond film deposited by hot filament CVD
Authors
Keywords
-
Journal
DIAMOND AND RELATED MATERIALS
Volume 18, Issue 11, Pages 1369-1374
Publisher
Elsevier BV
Online
2009-09-03
DOI
10.1016/j.diamond.2009.08.009

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