The effect of the CH4 level on the morphology, microstructure, phase purity and electrochemical properties of carbon films deposited by microwave-assisted CVD from Ar-rich source gas mixtures

Published 2009 View Full Article

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Title
The effect of the CH4 level on the morphology, microstructure, phase purity and electrochemical properties of carbon films deposited by microwave-assisted CVD from Ar-rich source gas mixtures
Authors
Keywords
-
Journal
DIAMOND AND RELATED MATERIALS
Volume 18, Issue 12, Pages 1426-1434
Publisher
Elsevier BV
Online
2009-10-04
DOI
10.1016/j.diamond.2009.09.011

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