Characterization of boron-doped micro- and nanocrystalline diamond films deposited by wafer-scale hot filament chemical vapor deposition for MEMS applications

Published 2007 View Full Article

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Title
Characterization of boron-doped micro- and nanocrystalline diamond films deposited by wafer-scale hot filament chemical vapor deposition for MEMS applications
Authors
Keywords
-
Journal
DIAMOND AND RELATED MATERIALS
Volume 17, Issue 1, Pages 23-28
Publisher
Elsevier BV
Online
2007-09-21
DOI
10.1016/j.diamond.2007.09.010

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