Characteristics of nanocomposite films deposited by atmospheric pressure uniform RF glow plasma

Title
Characteristics of nanocomposite films deposited by atmospheric pressure uniform RF glow plasma
Authors
Keywords
-
Journal
CURRENT APPLIED PHYSICS
Volume 11, Issue 2, Pages 250-254
Publisher
Elsevier BV
Online
2010-07-24
DOI
10.1016/j.cap.2010.07.017

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