Effect of oxygen partial pressure on the structural and optical properties of dc reactive magnetron sputtered molybdenum oxide films

Title
Effect of oxygen partial pressure on the structural and optical properties of dc reactive magnetron sputtered molybdenum oxide films
Authors
Keywords
-
Journal
CURRENT APPLIED PHYSICS
Volume 10, Issue 1, Pages 272-278
Publisher
Elsevier BV
Online
2009-06-10
DOI
10.1016/j.cap.2009.06.005

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