Growth of ZnO:Al transparent conducting layer on polymer substrate for flexible film typed dye-sensitized solar cell

Aluminium-doped zinc oxide (ZnO Al) conducting layer was deposited on polyethylene terephthalate (PET) substrate by rf magnetron sputtering to investigate the possible application of the film as transparent conducting electrode for film-typed dye-sensitized solar cells (FT-DSCs) The structural and electrical properties of ZnO Al thin film were influenced significantly by the position of PET substrate and by also gas pressure The minimum resistivity of 2 1 x 10(-3) Omega cm was obtained at gas pressure of 5 mTorr The deposition rate of ZnO Al film at 5 mforr of gas pressure was 248 nm/min The efficiency of prepared FT-DSCs sample with ZnO Al electrode showed about 2 1% (FF 0 54, V-oc 0 73 V, J(sc) 5 3 mA/cm(2)) (C) 2009 Elsevier B V All rights reserved