Preparation of chromium oxynitride and chromium nitride films by DC reactive magnetron sputtering and their material properties

Published 2010 View Full Article

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Title
Preparation of chromium oxynitride and chromium nitride films by DC reactive magnetron sputtering and their material properties
Authors
Keywords
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Journal
CORROSION ENGINEERING SCIENCE AND TECHNOLOGY
Volume 46, Issue 4, Pages 554-561
Publisher
Informa UK Limited
Online
2010-04-04
DOI
10.1179/147842209x12579401586807
References
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