Precursors as enablers of ALD technology: Contributions from University of Helsinki

Title
Precursors as enablers of ALD technology: Contributions from University of Helsinki
Authors
Keywords
-
Journal
COORDINATION CHEMISTRY REVIEWS
Volume 257, Issue 23-24, Pages 3297-3322
Publisher
Elsevier BV
Online
2013-07-18
DOI
10.1016/j.ccr.2013.07.002

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