4.4 Article

Highly responsive core-shell microactuator arrays for use in viscous and viscoelastic fluids

Journal

Publisher

IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/25/2/025004

Keywords

actuators; core-shell; biomimetics; microelectromechanical systems

Funding

  1. National Institute of Environmental Health Sciences (NIEHS) [1-RC1-ES018686]
  2. Div Of Chem, Bioeng, Env, & Transp Sys
  3. Directorate For Engineering [1437751] Funding Source: National Science Foundation

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We present a new fabrication method to produce arrays of highly responsive polymer-metal core-shell magnetic microactuators. The core-shell fabrication method decouples the elastic and magnetic structural components such that the actuator response can be optimized by adjusting the core-shell geometry. Our microstructures are 10 mu m long, 550 nm in diameter, and electrochemically fabricated in particle track-etched membranes, comprising a poly(dimethylsiloxane) core with a 100 nm Ni shell surrounding the upper 3-8 mu m. The structures can achieve deflections of nearly 90 degrees with moderate magnetic fields and are capable of driving fluid flow in a fluid 550 times more viscous than water.

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