Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 25, Issue 2, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/25/2/025004
Keywords
actuators; core-shell; biomimetics; microelectromechanical systems
Categories
Funding
- National Institute of Environmental Health Sciences (NIEHS) [1-RC1-ES018686]
- Div Of Chem, Bioeng, Env, & Transp Sys
- Directorate For Engineering [1437751] Funding Source: National Science Foundation
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We present a new fabrication method to produce arrays of highly responsive polymer-metal core-shell magnetic microactuators. The core-shell fabrication method decouples the elastic and magnetic structural components such that the actuator response can be optimized by adjusting the core-shell geometry. Our microstructures are 10 mu m long, 550 nm in diameter, and electrochemically fabricated in particle track-etched membranes, comprising a poly(dimethylsiloxane) core with a 100 nm Ni shell surrounding the upper 3-8 mu m. The structures can achieve deflections of nearly 90 degrees with moderate magnetic fields and are capable of driving fluid flow in a fluid 550 times more viscous than water.
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