Impact of sputter deposition parameters on molybdenum nitride thin film properties

Published 2015 View Full Article

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Title
Impact of sputter deposition parameters on molybdenum nitride thin film properties
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 25, Issue 7, Pages 074001
Publisher
IOP Publishing
Online
2015-05-22
DOI
10.1088/0960-1317/25/7/074001

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