A micro-scale hot wire anemometer based on low stress (Ni/W) multi-layers deposited on nano-crystalline diamond for air flow sensing

Published 2015 View Full Article

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Title
A micro-scale hot wire anemometer based on low stress (Ni/W) multi-layers deposited on nano-crystalline diamond for air flow sensing
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 25, Issue 12, Pages 125029
Publisher
IOP Publishing
Online
2015-11-18
DOI
10.1088/0960-1317/25/12/125029

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