Scalable fabrication of carbon-based MEMS/NEMS and their applications: a review

Published 2015 View Full Article

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Title
Scalable fabrication of carbon-based MEMS/NEMS and their applications: a review
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 25, Issue 11, Pages 113001
Publisher
IOP Publishing
Online
2015-09-25
DOI
10.1088/0960-1317/25/11/113001

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