A novel all-elastomer MEMS tactile sensor for high dynamic range shear and normal force sensing

Title
A novel all-elastomer MEMS tactile sensor for high dynamic range shear and normal force sensing
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 25, Issue 9, Pages 095009
Publisher
IOP Publishing
Online
2015-08-18
DOI
10.1088/0960-1317/25/9/095009

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