A MEMS Low-Noise Sound Pressure Gradient Microphone With Capacitive Sensing

Title
A MEMS Low-Noise Sound Pressure Gradient Microphone With Capacitive Sensing
Authors
Keywords
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Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 24, Issue 1, Pages 241-248
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2014-06-26
DOI
10.1109/jmems.2014.2329136

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