Compositional Dependence of the Young’s Modulus and Piezoelectric Coefficient of (110)-Oriented Pulsed Laser Deposited PZT Thin Films

Authors

Keywords

Journal

Volume 24, Issue 1, Pages 166-173

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Online

2014-05-31

DOI

10.1109/jmems.2014.2323476

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