Parylene-Based Electrochemical-MEMS Force Sensor for Studies of Intracortical Probe Insertion Mechanics

Published 2015 View Full Article

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Title
Parylene-Based Electrochemical-MEMS Force Sensor for Studies of Intracortical Probe Insertion Mechanics
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 24, Issue 5, Pages 1534-1544
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2015-04-18
DOI
10.1109/jmems.2015.2420043

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