Microfabricated Retarding Potential Analyzers With Enforced Aperture Alignment for Improved Ion Energy Measurements in Plasmas

Published 2015 View Full Article

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Title
Microfabricated Retarding Potential Analyzers With Enforced Aperture Alignment for Improved Ion Energy Measurements in Plasmas
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 24, Issue 5, Pages 1355-1369
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2015-02-24
DOI
10.1109/jmems.2015.2399373

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