A Submillimeter Package for Microsystems in High-Pressure and High-Salinity Downhole Environments

Title
A Submillimeter Package for Microsystems in High-Pressure and High-Salinity Downhole Environments
Authors
Keywords
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Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 24, Issue 4, Pages 861-869
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2014-09-20
DOI
10.1109/jmems.2014.2355191

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