Characterization and Modeling of Photostriction in Silicon Cantilevers Fabricated on Silicon-on-Insulator Substrates

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Title
Characterization and Modeling of Photostriction in Silicon Cantilevers Fabricated on Silicon-on-Insulator Substrates
Authors
Keywords
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Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 24, Issue 1, Pages 182-191
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2014-06-20
DOI
10.1109/jmems.2014.2324561

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