Anchor Losses in AlN Contour Mode Resonators

Title
Anchor Losses in AlN Contour Mode Resonators
Authors
Keywords
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Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 24, Issue 2, Pages 265-275
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2014-11-15
DOI
10.1109/jmems.2014.2367418

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