Magnetic field-assisted finishing for micropore X-ray focusing mirrors fabricated by deep reactive ion etching

Published 2010 View Full Article

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Title
Magnetic field-assisted finishing for micropore X-ray focusing mirrors fabricated by deep reactive ion etching
Authors
Keywords
-
Journal
CIRP ANNALS-MANUFACTURING TECHNOLOGY
Volume 59, Issue 1, Pages 351-354
Publisher
Elsevier BV
Online
2010-04-15
DOI
10.1016/j.cirp.2010.03.115

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