Chemo-mechanical magneto-rheological finishing (CMMRF) of silicon for microelectronics applications

Published 2010 View Full Article

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Title
Chemo-mechanical magneto-rheological finishing (CMMRF) of silicon for microelectronics applications
Authors
Keywords
-
Journal
CIRP ANNALS-MANUFACTURING TECHNOLOGY
Volume 59, Issue 1, Pages 323-328
Publisher
Elsevier BV
Online
2010-04-15
DOI
10.1016/j.cirp.2010.03.106

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