Reactive ion etching of poly(vinylidene fluoride-trifluoroethylene) copolymer for flexible piezoelectric devices

Authors

Keywords

reactive ion etching, P(VDF-TrFE), piezoelectric polymer, spin coating, flexible sensor

Journal

Volume 58, Issue 17, Pages 2091-2094

Publisher

Springer Nature

Online

2013-06-27

DOI

10.1007/s11434-013-5836-9

References

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