Journal
CHINESE PHYSICS LETTERS
Volume 27, Issue 1, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0256-307X/27/1/018102
Keywords
-
Categories
Funding
- National Natural Science Foundation of China [60976006]
- Liaoning Provincial Department of Education
- Higher Education Department of Liaoning Province
Ask authors/readers for more resources
Prefer-oriented and fine grained polycrystalline GaN films are prepared by plasma enhanced metal organic chemical vapour deposition on nucleation surfaces of freestanding thick diamond films. The characteristics of the GaN films are characterized by x-ray diffraction, reflection high energy electron diffraction and atomic force microscopy. The results indicate that the structure and morphology of the films are strongly dependent on the deposition temperature. The most significant improvements in morphological and structural properties of GaN films are obtained under the proper deposition temperature of 400 degrees C.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available