Generation of Optical Vortex Using a Spiral Phase Plate Fabricated in Quartz by Direct Laser Writing and Inductively Coupled Plasma Etching

Title
Generation of Optical Vortex Using a Spiral Phase Plate Fabricated in Quartz by Direct Laser Writing and Inductively Coupled Plasma Etching
Authors
Keywords
-
Journal
CHINESE PHYSICS LETTERS
Volume 26, Issue 1, Pages 014202
Publisher
IOP Publishing
Online
2009-01-29
DOI
10.1088/0256-307x/26/1/014202

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