One-Dimensional Fluid Model for Dust Particles in Dual-Frequency Capacitively Coupled Silane Discharges

Published 2009 View Full Article

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Title
One-Dimensional Fluid Model for Dust Particles in Dual-Frequency Capacitively Coupled Silane Discharges
Authors
Keywords
-
Journal
CHINESE PHYSICS LETTERS
Volume 26, Issue 8, Pages 085201
Publisher
IOP Publishing
Online
2009-08-04
DOI
10.1088/0256-307x/26/8/085201

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