Fabrication and Frequency Response Characteristics of AlN-Based Solidly Mounted Resonator

Published 2009 View Full Article

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Title
Fabrication and Frequency Response Characteristics of AlN-Based Solidly Mounted Resonator
Authors
Keywords
-
Journal
CHINESE PHYSICS LETTERS
Volume 26, Issue 4, Pages 048104
Publisher
IOP Publishing
Online
2009-04-01
DOI
10.1088/0256-307x/26/4/048104

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