Chemical Structure of HfO2/Si Interface with Angle-Resolved Synchrotron Radiation Photoemission Spectroscopy

Title
Chemical Structure of HfO2/Si Interface with Angle-Resolved Synchrotron Radiation Photoemission Spectroscopy
Authors
Keywords
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Journal
CHINESE PHYSICS LETTERS
Volume 25, Issue 10, Pages 3750-3752
Publisher
IOP Publishing
Online
2008-10-04
DOI
10.1088/0256-307x/25/10/063

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