Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Thin Films from a Zero-Valent (1,5-Hexadiene)(1-isopropyl-4-methylbenzene)ruthenium Complex and O2

Title
Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Thin Films from a Zero-Valent (1,5-Hexadiene)(1-isopropyl-4-methylbenzene)ruthenium Complex and O2
Authors
Keywords
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Journal
CHEMISTRY OF MATERIALS
Volume 26, Issue 24, Pages 7083-7090
Publisher
American Chemical Society (ACS)
Online
2014-12-03
DOI
10.1021/cm5035485

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