Telluroether and Selenoether Complexes as Single Source Reagents for Low Pressure Chemical Vapor Deposition of Crystalline Ga2Te3 and Ga2Se3 Thin Films

Title
Telluroether and Selenoether Complexes as Single Source Reagents for Low Pressure Chemical Vapor Deposition of Crystalline Ga2Te3 and Ga2Se3 Thin Films
Authors
Keywords
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Journal
CHEMISTRY OF MATERIALS
Volume 25, Issue 9, Pages 1829-1836
Publisher
American Chemical Society (ACS)
Online
2013-03-19
DOI
10.1021/cm400382j

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