Growth and Crystallization of TiO2 Thin Films by Atomic Layer Deposition Using a Novel Amido Guanidinate Titanium Source and Tetrakis-dimethylamido-titanium

Title
Growth and Crystallization of TiO2 Thin Films by Atomic Layer Deposition Using a Novel Amido Guanidinate Titanium Source and Tetrakis-dimethylamido-titanium
Authors
Keywords
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Journal
CHEMISTRY OF MATERIALS
Volume 25, Issue 15, Pages 2934-2943
Publisher
American Chemical Society (ACS)
Online
2013-07-03
DOI
10.1021/cm303703r

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