Mechanisms for Substrate-Enhanced Growth during the Early Stages of Atomic Layer Deposition of Alumina onto Silicon Nitride Surfaces

Published 2012 View Full Article

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Title
Mechanisms for Substrate-Enhanced Growth during the Early Stages of Atomic Layer Deposition of Alumina onto Silicon Nitride Surfaces
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 24, Issue 6, Pages 1080-1090
Publisher
American Chemical Society (ACS)
Online
2012-02-09
DOI
10.1021/cm203362d

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