Novel Heteroleptic Precursors for Atomic Layer Deposition of TiO2

Title
Novel Heteroleptic Precursors for Atomic Layer Deposition of TiO2
Authors
Keywords
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Journal
CHEMISTRY OF MATERIALS
Volume 24, Issue 17, Pages 3420-3424
Publisher
American Chemical Society (ACS)
Online
2012-08-11
DOI
10.1021/cm301594p

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