Substrate Reactivity Effects in the Atomic Layer Deposition of Aluminum Oxide from Trimethylaluminum on Ruthenium

Title
Substrate Reactivity Effects in the Atomic Layer Deposition of Aluminum Oxide from Trimethylaluminum on Ruthenium
Authors
Keywords
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Journal
CHEMISTRY OF MATERIALS
Volume 23, Issue 13, Pages 3159-3168
Publisher
American Chemical Society (ACS)
Online
2011-06-13
DOI
10.1021/cm200276z

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