Chemical Vapor Deposition of GaP and GaAs Thin Films From [nBu2Ga(μ-EtBu2)2GanBu2] (E= P or As) and Ga(PtBu2)3

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Title
Chemical Vapor Deposition of GaP and GaAs Thin Films From [nBu2Ga(μ-EtBu2)2GanBu2] (E= P or As) and Ga(PtBu2)3
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 23, Issue 23, Pages 5217-5222
Publisher
American Chemical Society (ACS)
Online
2011-11-15
DOI
10.1021/cm202158a

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