A Fundamental Study on Dissolution Behavior of High-Resolution Molecular Glass Photoresists

Published 2008 View Full Article

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Title
A Fundamental Study on Dissolution Behavior of High-Resolution Molecular Glass Photoresists
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 20, Issue 23, Pages 7292-7300
Publisher
American Chemical Society (ACS)
Online
2008-11-11
DOI
10.1021/cm802295y

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