Two-Stage Atomic Layer Deposition of Aluminum Oxide on Alkanethiolate Self-Assembled Monolayers Usingn-Propanol and Water as Oxygen Sources

Published 2008 View Full Article

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Title
Two-Stage Atomic Layer Deposition of Aluminum Oxide on Alkanethiolate Self-Assembled Monolayers Usingn-Propanol and Water as Oxygen Sources
Authors
Keywords
-
Journal
CHEMISTRY OF MATERIALS
Volume 20, Issue 16, Pages 5356-5360
Publisher
American Chemical Society (ACS)
Online
2008-07-30
DOI
10.1021/cm702848y

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