Remote Plasma-Assisted CVD Growth of Carbon Nanotubes in an Optimised Rapid Thermal Reactor

The advances in the use of a remote plasma in combination with a rapid radiative reactor in plasma-enhanced (PE) CVD is presented here. The characteristics and parameters of this system are fully analyzed and compared with conventional CVD growth methods. Growth of multi- and single-walled carbon nanotubes (CNTs) at low temperatures with high quality and reproducibility has been achieved in this way. Further, a new catalytic system, which gives dense multi-wall CNTs on metal substrates, is presented.