Atomic Layer Deposition of Ruthenium Thin Films from an Amidinate Precursor

Title
Atomic Layer Deposition of Ruthenium Thin Films from an Amidinate Precursor
Authors
Keywords
-
Journal
CHEMICAL VAPOR DEPOSITION
Volume -, Issue -, Pages n/a-n/a
Publisher
Wiley
Online
2009-12-09
DOI
10.1002/cvde.200906789

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