Molecular Dynamics Simulations of the Sticking and Etch Behavior of Various Growth Species of (Ultra)Nanocrystalline Diamond Films

Published 2008 View Full Article

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Title
Molecular Dynamics Simulations of the Sticking and Etch Behavior of Various Growth Species of (Ultra)Nanocrystalline Diamond Films
Authors
Keywords
-
Journal
CHEMICAL VAPOR DEPOSITION
Volume 14, Issue 7-8, Pages 213-223
Publisher
Wiley
Online
2008-08-19
DOI
10.1002/cvde.200706657

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