Atomic Layer Deposition of Iron Oxide Thin Films and Nanotubes using Ferrocene and Oxygen as Precursors

Title
Atomic Layer Deposition of Iron Oxide Thin Films and Nanotubes using Ferrocene and Oxygen as Precursors
Authors
Keywords
-
Journal
CHEMICAL VAPOR DEPOSITION
Volume 14, Issue 3-4, Pages 67-70
Publisher
Wiley
Online
2008-04-17
DOI
10.1002/cvde.200706649

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