Improvement of electromigration reliability and diffusion of Cu films using coherent Cu(111)/Cr2O3(0001) interfaces

Published 2012 View Full Article

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Title
Improvement of electromigration reliability and diffusion of Cu films using coherent Cu(111)/Cr2O3(0001) interfaces
Authors
Keywords
-
Journal
CHEMICAL PHYSICS LETTERS
Volume 542, Issue -, Pages 85-88
Publisher
Elsevier BV
Online
2012-06-05
DOI
10.1016/j.cplett.2012.05.071

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