Development of an original model for the synthesis of silicon nanodots by Low Pressure Chemical Vapor Deposition

Published 2008 View Full Article

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Title
Development of an original model for the synthesis of silicon nanodots by Low Pressure Chemical Vapor Deposition
Authors
Keywords
-
Journal
CHEMICAL ENGINEERING JOURNAL
Volume 140, Issue 1-3, Pages 600-608
Publisher
Elsevier BV
Online
2008-03-15
DOI
10.1016/j.cej.2008.02.027

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