Comparative study of the sintering process and thin film sputtering of AZO, GZO and AGZO ceramics targets

Published 2014 View Full Article

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Title
Comparative study of the sintering process and thin film sputtering of AZO, GZO and AGZO ceramics targets
Authors
Keywords
-
Journal
CERAMICS INTERNATIONAL
Volume 40, Issue 8, Pages 12905-12915
Publisher
Elsevier BV
Online
2014-05-07
DOI
10.1016/j.ceramint.2014.04.150

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