Microstructure and deposition mechanism of CVD amorphous boron carbide coatings deposited on SiC substrates at low temperature

Title
Microstructure and deposition mechanism of CVD amorphous boron carbide coatings deposited on SiC substrates at low temperature
Authors
Keywords
-
Journal
CERAMICS INTERNATIONAL
Volume 35, Issue 5, Pages 1877-1882
Publisher
Elsevier BV
Online
2008-11-18
DOI
10.1016/j.ceramint.2008.10.020

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