Conductive amorphous hydrocarbon film for bio-sensor formed by low temperature neutral beam enhanced chemical vapor deposition

Published 2013 View Full Article

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Title
Conductive amorphous hydrocarbon film for bio-sensor formed by low temperature neutral beam enhanced chemical vapor deposition
Authors
Keywords
-
Journal
CARBON
Volume 67, Issue -, Pages 635-642
Publisher
Elsevier BV
Online
2013-10-22
DOI
10.1016/j.carbon.2013.10.037

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