Fabrication Process for Micro Thermoelectric Generators (μTEGs)

Title
Fabrication Process for Micro Thermoelectric Generators (μTEGs)
Authors
Keywords
Micro thermoelectric generator, electrochemical deposition, bismuth telluride, microstructure, multilamination
Journal
JOURNAL OF ELECTRONIC MATERIALS
Volume 45, Issue 3, Pages 1502-1507
Publisher
Springer Nature
Online
2015-10-15
DOI
10.1007/s11664-015-4088-7

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