Growth of aluminium nitride with linear change of ammonia flow

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Title
Growth of aluminium nitride with linear change of ammonia flow
Authors
Keywords
A1. Surface structure, A3. Low pressure metalorganic vapor phase epitaxy, B1. Nitrides, B2. Semiconducting aluminum compounds
Journal
JOURNAL OF CRYSTAL GROWTH
Volume 414, Issue -, Pages 81-86
Publisher
Elsevier BV
Online
2014-11-17
DOI
10.1016/j.jcrysgro.2014.11.015

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