Effect of hydrogen carrier gas on AlN and AlGaN growth in AMEC Prismo D-Blue ® MOCVD platform

Published 2015 View Full Article

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Title
Effect of hydrogen carrier gas on AlN and AlGaN growth in AMEC Prismo D-Blue ® MOCVD platform
Authors
Keywords
A1. Atomic force microscopy, A1. X-ray diffraction, A1. Computation simulation, A3. Metal organic chemical vapor deposition, B1. AlN, B1. AlGaN
Journal
JOURNAL OF CRYSTAL GROWTH
Volume 419, Issue -, Pages 52-56
Publisher
Elsevier BV
Online
2015-03-05
DOI
10.1016/j.jcrysgro.2015.02.084

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